Barriers to defect melting in chemo-epitaxial directed self-assembly of lamellar-forming diblock copolymer/homopolymer blends

TitleBarriers to defect melting in chemo-epitaxial directed self-assembly of lamellar-forming diblock copolymer/homopolymer blends
Publication TypeConference Paper
Year of Publication2015
AuthorsIzumi K, Kim BJ, Laachi N, Delaney KT, Carilli MF, Fredrickson GH
EditorResnick DJ, Bencher C
Conference NameProc. SPIE 9423, Alternative Lithographic Technologies VII
Date Published03/2015
PublisherInternational Society for Optics and Photonics
Conference LocationSan Jose, CA
Keywords21975, CNSI/MRL, CSC, Fredrickson, MRL
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2211994
DOI10.1117/12.2085685
Grant: 
CSC, MRL (DMR-1121053)