Title | Barriers to defect melting in chemo-epitaxial directed self-assembly of lamellar-forming diblock copolymer/homopolymer blends |
Publication Type | Conference Paper |
Year of Publication | 2015 |
Authors | Izumi K, Kim BJ, Laachi N, Delaney KT, Carilli MF, Fredrickson GH |
Editor | Resnick DJ, Bencher C |
Conference Name | Proc. SPIE 9423, Alternative Lithographic Technologies VII |
Date Published | 03/2015 |
Publisher | International Society for Optics and Photonics |
Conference Location | San Jose, CA |
Keywords | 21975, CNSI/MRL, CSC, Fredrickson, MRL |
URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2211994 |
DOI | 10.1117/12.2085685 |
Grant:
CSC, MRL (DMR-1121053)