Directed self-assembly of diblock copolymers in multi-VIA configurations: effect of chemopatterned substrates on defectivity

TitleDirected self-assembly of diblock copolymers in multi-VIA configurations: effect of chemopatterned substrates on defectivity
Publication TypeConference Proceedings
Year of Conference2016
AuthorsCarpenter CL, Delaney KT, Fredrickson GH
Conference NameProc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII
Volume9779
Pagination97791E
Date Published03/2016
PublisherInternational Society for Optics and Photonics
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2218644
DOI10.1117/12.2218644
Grant: 
MRI R2 (CNS-0960316), CSC, MRL (DMR-1121053)