Title | Effects of capping HfO2 with multivalent oxides toward reducing the number of charged defects |
Publication Type | Journal Article |
Year of Publication | 2010 |
Authors | Umezawa N |
Journal | Appl. Phys. Lett. |
Volume | 96 |
Pagination | 162906 |
Title | Effects of capping HfO2 with multivalent oxides toward reducing the number of charged defects |
Publication Type | Journal Article |
Year of Publication | 2010 |
Authors | Umezawa N |
Journal | Appl. Phys. Lett. |
Volume | 96 |
Pagination | 162906 |