Title | Impact of carbon and nitrogen impurities in high-k dielectrics on metal-oxide-semiconductor devices |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | Choi M, Lyons JL, Janotti A, Van de Walle CG |
Journal | Appl. Phys. Lett |
Volume | 102 |
Pagination | 142902 |
DOI | 10.1063/1.4801497 |
Grant:
MRI R2 (CNS-0960316), MRL (DMR-1121053)