Title | Point defects in Al2O3 and their impact on gate stacks |
Publication Type | Journal Article |
Year of Publication | 2009 |
Authors | Weber J.R., Janotti A., Van de Walle C.G. |
Journal | Microelectronic Engineering |
Volume | 86 |
Pagination | 1756 |
Title | Point defects in Al2O3 and their impact on gate stacks |
Publication Type | Journal Article |
Year of Publication | 2009 |
Authors | Weber J.R., Janotti A., Van de Walle C.G. |
Journal | Microelectronic Engineering |
Volume | 86 |
Pagination | 1756 |