| Title | Point defects in Al2O3 and their impact on gate stacks |
| Publication Type | Journal Article |
| Year of Publication | 2009 |
| Authors | Weber J.R., Janotti A., Van de Walle C.G. |
| Journal | Microelectronic Engineering |
| Volume | 86 |
| Pagination | 1756 |
| Title | Point defects in Al2O3 and their impact on gate stacks |
| Publication Type | Journal Article |
| Year of Publication | 2009 |
| Authors | Weber J.R., Janotti A., Van de Walle C.G. |
| Journal | Microelectronic Engineering |
| Volume | 86 |
| Pagination | 1756 |