Title | Suppression of thermal fluctuation placement errors in linear arrays of block copolymer cylinders |
Publication Type | Conference Paper |
Year of Publication | 2017 |
Authors | Carpenter CL, Delaney KT, Fredrickson GH |
Conference Name | Advances in Patterning Materials and Processes XXXIV |
Date Published | 03/2017 |
Publisher | International Society for Optics and Photonics |
Grant:
MRI R2 (CNS-0960316), CSC, MRL (DMR-1121053)