Suppression of thermal fluctuation placement errors in linear arrays of block copolymer cylinders

TitleSuppression of thermal fluctuation placement errors in linear arrays of block copolymer cylinders
Publication TypeConference Paper
Year of Publication2017
AuthorsCarpenter CL, Delaney KT, Fredrickson GH
Conference NameAdvances in Patterning Materials and Processes XXXIV
Date Published03/2017
PublisherInternational Society for Optics and Photonics
Grant: 
MRI R2 (CNS-0960316), CSC, MRL (DMR-1121053)