Variable-angle high-angle annular dark-field imaging: application to three-dimensional dopant atom profiling

TitleVariable-angle high-angle annular dark-field imaging: application to three-dimensional dopant atom profiling
Publication TypeJournal Article
Year of Publication2015
AuthorsZhang JY, Hwang J, Isaac BJ, Stemmer S
JournalScientific reports
Volume5
Grant: 
MRI R2 (CNS-0960316), CSC, MRL (DMR-1121053)