Atomic scale investigation of aluminum incorporation, defects, and phase stability in β-(AlxGa1- x) 2O3 films

TitleAtomic scale investigation of aluminum incorporation, defects, and phase stability in β-(AlxGa1- x) 2O3 films
Publication TypeJournal Article
Year of Publication2021
AuthorsJohnson JM, Huang H-L, Wang M, Mu S, Varley JB, Bhuiyan AFMAnhar Uddi, Feng Z, Kalarickal NKurian, Rajan S, Zhao H,
JournalAPL Materials
Volume9
Pagination051103
DOI10.1063/5.0039769
Grant: 
MRI (CNS-1725797)