Title | Computational studies of shape rectification in directed self-assembly |
Publication Type | Conference Paper |
Year of Publication | 2014 |
Authors | Iwama T, Laachi N, Delaney KT, Kim BJ, Fredrickson GH |
Editor | Resnick DJ, Bencher C |
Conference Name | Proc. SPIE 9049, Alternative Lithographic Technologies VI |
Date Published | 03/2014 |
Publisher | International Society for Optics and Photonics |
Conference Location | San Francisco, CA |
Keywords | 21975, CNSI/MRL, CSC, Fredrickson, MRL |
URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1854502 |
DOI | 10.1117/12.2046187 |
Grant:
CSC, MRL (DMR-1121053)