| Title | Directed self-assembly of diblock copolymers in multi-VIA configurations: effect of chemopatterned substrates on defectivity |
| Publication Type | Conference Proceedings |
| Year of Conference | 2016 |
| Authors | Carpenter CL, Delaney KT, Fredrickson GH |
| Conference Name | Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII |
| Volume | 9779 |
| Pagination | 97791E |
| Date Published | 03/2016 |
| Publisher | International Society for Optics and Photonics |
| URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2218644 |
| DOI | 10.1117/12.2218644 |
Grant:
MRI R2 (CNS-0960316), CSC, MRL (DMR-1121053)