Title | The role of oxygen-related defects and hydrogen impurities in HfO2 and ZrO2 |
Publication Type | Journal Article |
Year of Publication | 2011 |
Authors | Janotti A., Van de Walle C.G. |
Journal | Microelectronic Engineering |
Volume | 88(7) |
Pagination | 1452-1456 |
Grant:
MRI, CSC