| Title | Theoretical model for artificial structure modulation of HfO2/SiOx/Si interface by deposition of a dopant material |
| Publication Type | Journal Article |
| Year of Publication | 2012 |
| Authors | Umezawa N, Shiraishi K |
| Journal | Applied Physics Letters |
| Volume | 100 |
| Issue | 9 |
| Pagination | 092904 |
| Date Published | 02/2012 |
| ISSN | 00036951 |
| Keywords | CNSI, CSC, field effect transistors, hafnium compounds, oxidation, semiconductor doping, silicon, silicon compounds, tantalum |
| URL | http://link.aip.org/link/?APPLAB/100/092904/1 |
| DOI | 10.1063/1.3689968 |
Grant:
CSC