Title | Variable-angle high-angle annular dark-field imaging: application to three-dimensional dopant atom profiling |
Publication Type | Journal Article |
Year of Publication | 2015 |
Authors | Zhang JY, Hwang J, Isaac BJ, Stemmer S |
Journal | Scientific reports |
Volume | 5 |
Grant:
MRI R2 (CNS-0960316), CSC, MRL (DMR-1121053)